工业设备
Dosing accuracy +/- 2%
Perfect Drying
Fast & Stable transport unit
光伏
Batch XL
适合高效率太阳能电池(n-type)的最佳系统
超容量槽式设备 (最高性价比)
Features & Benefits
各类槽式应用
- Alkaline / Acidic texturing
- pSC1 / SC2 / O3 cleaning
- Oxidation
高生产量
- 600 wafers load
- up to 12,000w/h
210
可适用的最大硅片尺寸为
Up to M12 (210 x 210mm)
补液精准度高
+/- 2%
完美干燥
不含金属成分
wet process
Blower
Spray
Inline XL
链式适用(n-type)的最佳系统
Features & Benefits
各类链式应用
- Roller brush / Disc brush
- Bubble jet
- Ultrasonic / Plasma
不产生微粒
210
可适用的最大硅片尺寸为
Up to M12 (210 x 210mm)
完美干燥
各类链式应用
- HF/Metal Cleaning
- RCA & O3 Cleaning
- Developing / Etching / Striping
- Electrical deposition
玻璃 (Thin film, FPD)
SEAline Glass Cleaner
目标零微粒
Features & Benefits
各类链式应用
- RCA & O3 Cleaning
- Developing / Etching
/ Striping
多种清洗用途
- Roller brush / Disc brush
- Bubble jet
- Ultrasonic / Plasma
可适用的最大玻璃、
显示屏尺寸为
Generation 7
不产生微粒
完美干燥
Inline wet process
Easy maintenance
High pressure spray cleaning
半导体
SEAbatch SEMI
Ultra capacity batch equipment (highest cost performace)
Features & Benefits
各类槽式应用
- RCA / SPM / HFO3 / DIO3 cleaning
- Developing / Etchiong / Stripping
- Oxidation / Special drying
不产生微粒
- RCA cleaning < 30EA
- Dry < 30EA
可用基材
- Si wafer up to 300mm
- Glass / Ceramics up to 500x500mm
完美干燥
补液精准度高 +/- 2ml
不含金属成分
智慧工厂
Ready for the industrie 4.0
Smart AGV
Benefits
- Automate factory logistics & optimize workflows
- Autonomous / safe / scalable / efficient / agile
SR7P
SR9
SR7C
MotorSense
Motor Failure Prediction System
Benefits
- AI powered motor failure prediction
- Precise predictive notifications of equipment abnormality
to avoid unexpected breakdowns
- Real-time monitoring service
* anytime, anywhere access to Web & Mobile
