工业设备

SEAbatch PV
Dosing bottle
Dosing bottle

Dosing accuracy +/- 2%

Hot Water Dry
Hot Water Dry

Perfect Drying

Transport unit
Transport unit

Fast & Stable transport unit

光伏

Batch XL

适合高效率太阳能电池(n-type)的最佳系统
超容量槽式设备 (最高性价比)

Features & Benefits

各类槽式应用

  - Alkaline / Acidic texturing
  - pSC1 / SC2 / O3 cleaning
  - Oxidation

高生产量

  - 600 wafers load 
  - up to 12,000w/h

210

可适用的最大硅片尺寸为

Up to M12 (210 x 210mm)

补液精准度高

+/- 2%

完美干燥

不含金属成分

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wet process
wet process

wet process

Blower
Blower

Blower

Spray
Spray

Spray

Inline XL

链式适用(n-type)的最佳系统

Features & Benefits

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各类链式应用

  - Roller brush / Disc brush 
  - Bubble jet
  - Ultrasonic / Plasma

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不产生微粒

210

可适用的最大硅片尺寸为

Up to M12 (210 x 210mm)

完美干燥

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各类链式应用

  - HF/Metal Cleaning
  - RCA & O3 Cleaning
  - Developing / Etching / Striping
  - Electrical deposition

 

玻璃 (Thin film, FPD)

SEAline Glass Cleaner

目标零微粒

Features & Benefits

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各类链式应用

  - RCA & O3 Cleaning
  - Developing / Etching

     / Striping

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多种清洗用途

  - Roller brush / Disc brush
  - Bubble jet
  - Ultrasonic / Plasma

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可适用的最大玻璃、

显示屏尺寸为

Generation 7

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不产生微粒

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完美干燥

Bubblejet_1
Bubblejet_1

Inline wet process

Roller brush_1
Roller brush_1

Easy maintenance

Transport_1
Transport_1

High pressure spray cleaning

半导体

SEAbatch SEMI

Ultra capacity batch equipment (highest cost performace)

Features & Benefits

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各类槽式应用

  - RCA / SPM / HFO3 / DIO3 cleaning
  - Developing / Etchiong / Stripping
  - Oxidation / Special drying

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不产生微粒

  - RCA cleaning < 30EA
  - Dry < 30EA

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可用基材

  - Si wafer up to 300mm

  - Glass / Ceramics up to 500x500mm

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完美干燥

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补液精准度高 +/- 2ml

不含金属成分

智慧工厂

Ready for the industrie 4.0

Smart AGV

Benefits

  - Automate factory logistics & optimize workflows
  - Autonomous / safe / scalable / efficient / agile

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SR7P

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SR9

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SR7C

MotorSense

Motor Failure Prediction System

Benefits

  - AI powered motor failure prediction
  - Precise predictive notifications of equipment abnormality

     to avoid unexpected breakdowns
  - Real-time monitoring service
    * anytime, anywhere access to Web & Mobile

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