工业设备
Dosing accuracy +/- 2%
Perfect Drying
Fast & Stable transport unit
wet process
Blower
Spray
Inline wet process
Easy maintenance
High pressure spray cleaning
半导体
SEAbatch SEMI
Ultra capacity batch equipment (highest cost performace)
Features & Benefits
各类槽式应用
- RCA / SPM / HFO3 / DIO3 cleaning
- Developing / Etchiong / Stripping
- Oxidation / Special drying
不产生微粒
- RCA cleaning < 30EA
- Dry < 30EA
可用基材
- Si wafer up to 300mm
- Glass / Ceramics up to 500x500mm
完美干燥
补液精准度高 +/- 2ml
不含金属成分
智慧工厂
Ready for the industrie 4.0
Smart AGV
Benefits
- Automate factory logistics & optimize workflows
- Autonomous / safe / scalable / efficient / agile
SR7P
SR9
SR7C
MotorSense
Motor Failure Prediction System
Benefits
- AI powered motor failure prediction
- Precise predictive notifications of equipment abnormality
to avoid unexpected breakdowns
- Real-time monitoring service
* anytime, anywhere access to Web & Mobile